Method of manufacturing a watch component

专利摘要:
The method comprises the steps of providing a plate (2) made of a micro-machinable material, forming the watch component (1) with at least one fastener (3) for holding the rest of the plate (2), by engraving the plate (2) and producing, along a desired breaking line of the fastener, a pre-stain zone (4) comprising at least one opening (5) obtained by etching in the thickness of the plate (2).
公开号:CH709082B1
申请号:CH01990/14
申请日:2014-12-19
公开日:2018-12-14
发明作者:Bossart Richard；Michelet Edward
申请人:Rolex Sa；
IPC主号:

专利说明:

Description: The present invention relates to a method for manufacturing a timepiece component produced from a micro-machinable material.
It is known to manufacture watch components from a micro-machinable material such as silicon and by techniques derived from microelectronics, in particular by deep reactive ion etching (in English Deep Reactive Ion Etching DRIE). The manufacturing process generally includes the following steps:
- have a plate made of micro-machinable material, for example silicon,
- form the watch component, by etching through the entire thickness of the plate,
- release the component by separating it from the rest of the plate.
The use of materials and manufacturing techniques from microelectronics offers very interesting possibilities, particularly in terms of precision. One difficulty to overcome, however, is to release the component without damaging it. Generally, fasteners, or bridges of material, are provided between the timepiece component and the rest of the plate. The purpose of these fasteners is to keep the part integral with the plate during the entire manufacture of the component, in particular during treatments applied to the component after etching (heat treatment, depositing of a coating, etc.), while facilitating the release of the component at the end of manufacturing.
Document EP 2 145 857 describes a process for manufacturing a timepiece component similar to that described above. Material bridges are engraved and keep the component integral with the plate during the various stages of manufacturing the watch component. In order to facilitate the release of the component at the end of manufacture, the material bridges have a narrowed section at the end connected to the component. This creates a zone of weakness facilitating the breaking of the material bridges. At the end of manufacture, the watch component is released from the plate by fragile rupture of the material at the level of the fasteners, or bridges of material, in response to an adapted mechanical stress. The breakage of the material by fragile break between the material bridge and the component is difficult to control.
Document WO 2013/093 108 describes a process for manufacturing a micromechanical part from a plate made of a micro-machinable material, fasteners being formed between the part and the plate. These attachments are weakened locally by thinning to create joints. These are adapted to allow detachment of the component by a torsional force in the plane of the plate. This results in a rupture between the part and the plate which lacks precision. The location of the rupture is not precisely determinable a priori. It will be located along the weakened fastener, without it being possible to know in advance whether it will be close to the part or the plate. This can be inconvenient both functionally and aesthetically. In addition, to release the part by twisting in the plane of the plate, it is necessary to provide space around the part to allow relative movement of the plate and the part. This means reducing the number of parts made from a plate.
The present invention improves the situation.
To this end, the invention relates to a method of manufacturing a timepiece component comprising the following steps:
- have a plate made of a micro-machinable material;
- Form the watch component with at least one attachment to the rest of the plate, by etching the plate; characterized by the fact that it comprises a step consisting in producing, along a desired line of rupture of the fastener, a pre-spotting zone comprising at least one opening obtained by etching in the thickness of the plate.
The invention consists in forming a pre-spotting area along a precisely determined breaking line. One or more openings are etched in the thickness of the plate in order to create an area of lower mechanical resistance, corresponding to the pre-spotting area, and to initiate rupture at the desired location, along the line desired break.
The watch component can be obtained by etching the plate throughout its thickness. In other words, in this case one or more through openings are etched in the plate to form the component.
In a particular embodiment, said opening is obtained by etching part of the thickness of the plate.
According to a first embodiment, said opening extends along the entire rupture line.
According to a second embodiment, the pre-spotting area has a plurality of openings aligned along the breaking line.
The length of the openings can be for example between 2 and 10 pm.
Ultimately, the pre-spotting area may include a single opening extending along the break line, or several openings aligned along the break line and separated by bridges. In any event, the rupture surface obtained after releasing the timepiece component from the plate is much cleaner than with a standard fastener. In addition, the risk of creating crack initiators in the component is limited.
CH 709 082 B1 Advantageously, the depth of the opening is less than or equal to 90% of the thickness of the plate, preferably less than or equal to 60% of said thickness.
Advantageously also, the depth of the opening or openings is greater than or equal to half the thickness of the plate.
The width of the opening (s) can be between 1 and 10 pm, in particular between 1 and 5 pm.
In a particular embodiment, the etching of the timepiece component and the etching of the opening of the pre-spotting area are carried out simultaneously.
In this case, the width of said opening of the pre-spotting area is advantageously less than the width of a through opening intended to form the timepiece component, in particular less than the smallest of the widths of a plurality of 'through openings forming the watch component.
In a particular embodiment, the width of the through opening intended to form the component being greater than 40 μm, the width of said opening of the pre-spotting zone is between 1 and 10 μm, in particular between 1 and 5 pm.
Such a width of the pre-spotting opening promotes detachment of the component caused by mechanical stress in a direction perpendicular to the plane of the plate, which is very simple and practical to implement.
Advantageously, the etching of the timepiece component and the etching of the opening of the pre-spotting area are carried out by deep reactive ion etching.
In another embodiment, the etching of the opening of the pre-spotting area and the etching of the timepiece component are carried out separately, respectively by means of femtosecond laser pulses and by deep reactive ion etching.
The material of the plate can be a fragile material, in particular one of the materials of the group comprising silicon, diamond, quartz and ceramic.
Advantageously, it includes a step of releasing the timepiece component by breaking or breaking the fastener along the breaking line.
Advantageously, during the step of releasing the timepiece component, it causes rupture by exerting on the fastener a mechanical force in a direction having an angle less than or equal to 45 ° relative to a direction perpendicular to the plate. , in particular less than or equal to 30 ° relative to a direction perpendicular to the plate, preferably in a direction perpendicular, or substantially perpendicular, to the plate.
Thanks to this, the release of the timepiece component is simple and practical to implement. In addition, it does not require leaving space around the components. It is therefore possible to optimize the use of the plate to manufacture as many components as possible from it.
The timepiece component can be one of the elements of the group comprising a balance spring, a wheel, a needle, a spring, an anchor and a balance wheel.
The invention also relates to a plate made of micro-machinable material comprising a timepiece component and at least one holding clip between the timepiece component and the rest of the plate, formed by openings etched in the thickness of the plate, characterized by the fact that it comprises a zone for pre-spotting the timepiece component comprising, along a desired line of rupture of the fastener, at least one opening etched in the thickness of the plate.
The invention finally relates to a timepiece component made of micro-machinable material comprising a partially etched rupture zone.
The invention will be better understood using the following description of different embodiments of the method for manufacturing a timepiece component, a plate of micro-machinable material incorporating a timepiece component and a component clockmaker according to the invention, with reference to the accompanying drawings in which:
fig. 1A, 1B and 1C respectively represent a top view and a sectional view (in the yz plane) of a fastener between a timepiece component and a plate of micro-machinable material, and a partial view of the timepiece component, of the plate and of the fastener, according to a first embodiment;
fig. 2 shows a view of a material bridge between a timepiece component and a plate of micro-machinable material, according to the prior art;
CH 709 082 B1 fig. 3 shows a top view of a material bridge between a timepiece component and a plate of micro-machinable material, according to an embodiment similar to that of FIGS. 1A and 1B;
fig. 4 shows a top view of a material bridge between a timepiece component and a plate of micro-machinable material, according to a second embodiment;
fig. 5 shows a top view of a material bridge between a timepiece component and a plate of micro-machinable material, according to a variant of the second embodiment;
fig. 6 shows an enlarged and partial view of a pre-spotting area of a material bridge according to a variant of the second embodiment;
fig. 7A and 7B fig. 8 fig. 9 fig. 10A to 10F represent rupture zones respectively of a timepiece component according to the prior art and of a timepiece component according to the first embodiment;
represents another illustrative example of a rupture surface obtained by the implementation of the method of the invention, represents a flow diagram of the stages of the manufacturing process, according to a particular embodiment;
represent a detail view of the pre-spotting area of an attachment between a timepiece component and a plate of micro-machinable material, according to a first embodiment (fig. 10C and 10D), a second embodiment (fig . 10E and 10F) and according to another embodiment (FIGS. 10A and 10B).
Referring to FIG. 9, the method of the invention mainly comprises four steps S1, S2, S3 and S4 intended to manufacture a timepiece component 1 from a micro-machinable material.
By "micro-machinable" material is meant to denote any material suitable for micro-machining. According to the illustrated professional dictionary of Berner watchmaking, micro-machining means “all the techniques resulting from microelectronics (chemical attacks, photolithography, deposition of thin layers in the vapor phase, etc.), added to other techniques allowing the machining of a wide range of materials such as semiconductors, ceramics, metals, certain polymers, etc. ”. The micro-machinable material used in the exemplary embodiments described below is silicon. Other micro-machinable materials could obviously be used instead, such as diamond, quartz and ceramic.
Step S1 consists of providing a plate 2 of micro-machinable material, here a wafer (or "wafer") of silicon, similar to those used for the manufacture of microelectronic components. The wafer has for example a thickness of 150 μm. Obviously, other thicknesses of inserts can be used.
Step S2 consists in forming in the plate a timepiece component 1 and one or more fasteners 3 for holding the component 1 to the rest of the plate 2. The timepiece component 1 and its fasteners 3 are produced simultaneously, respectively during sub-steps referenced S20 ("DRIE_1") and S21 ("DRIE_2"), by photolithography followed by deep reactive ion etching. During these steps S20 and S21, parts around the component 1 and clips 3 are etched in the plate 2, here throughout its thickness. In other words, a pattern composed of through openings is etched in the plate 2, the forms of these being adapted to form the component 1 and its fasteners 3.
Alternatively, to form the timepiece component, one could use a plate formed of several layers, for example an SOI plate formed of two Si layers sandwiching a SiO2 layer, where one of the Si layers is used to form the component, and the other Si layer is used as support. In such a case, the expression “through opening” means an opening which crosses the entire Si layer in which the component is formed, and not an opening which crosses the entire SOL plate. The role of the fasteners 3 is to maintain the timepiece component 1 secured to the plate 2 during manufacture and to allow release of the timepiece component 1, by rupture of the fastener 3, at the end of manufacture. The fasteners 3 are material bridges between the engraved timepiece component 1 and the rest of the plate 2. They can have various shapes.
By definition, the term "length" of a fastener means the dimension of the fastener in a longitudinal direction connecting the midpoints of the two connecting ends of the fastener (respectively to the rest of the plate 2 and to the component 1 ), in the plane of the plate 2 (that is to say a plane parallel to the upper and lower surfaces of the plate, through which the latter extends). Similarly, the dimension of the fastener in a direction perpendicular to the longitudinal direction is called "width". In fig. 1A and 1B, the length of the fastener 3 corresponds to the dimension along the y axis and its width corresponds to the dimension along the x axis.
In the exemplary embodiment illustrated by FIGS. 1A and 1B, the width of the fastener 3 decreases continuously from its connection end to the rest of the plate 2 to its connection end to the timepiece component 1. We could
CH 709 082 B1, however, consider other forms of fastening 3, in particular a fastening of constant width, with possibly a narrowing near the end of connection to the component.
In Figs. 1A, 1B and 1C, the timepiece component 1 shown is a hairspring (only one half of the hairspring, from the center to the edge, being shown in FIG. 1B and 1C). Obviously, the process of the invention applies to the manufacture of other watch components. The timepiece component can be an entity ready to be mounted in a movement (for example a hand, a spring, etc.) or a part intended to be assembled with one or more other parts (for example a balance spring at the pendulum axis , a wheel board to its axis, an anchor to the anchor rod (or axis), a pendulum to the pendulum axis, etc.) before mounting.
Step S3 consists in producing, for each fastener 3, along a desired breaking line of the fastener 3, a pre-spotting area 4.
By “breaking line” is meant to denote a line in the plane of the plate along which the breaking of the material is desired when the component 1 is released from the plate 2. The breaking line here comprises a straight segment extending in the direction of the width of the fastener 3 (that is to say in the direction x), and over the entire width of the fastener 3, at the connection end of the fastener 3 to the component 1. One could obviously envisage other forms of breaking line and other locations (for example in the middle of the fastener, or at the end of connection with the plate).
The pre-spotting area 4 extends along the breaking line, at the connection end of the clip 3 to the timepiece component 1, over the entire width of the clip 3 (in the direction x in fig. 1A). The length of the pre-spotting zone 4, that is to say its dimension along the breaking line (that is to say in the direction x in FIG. 1 A), is for example between 20 and 150 μm .
In the embodiment shown in Figs. 1A and 1B, to make the pre-spotting area 4, an opening 5 is etched which extends continuously along the entire breaking line and thus crosses the fastener 3 in the width direction. The opening 5 is in the form of a trench extending in the direction x and having a right U-shaped cross section (fig. 1B).
The depth of the trench 5 is for example equal to about 75% of the total thickness of the plate (or of the component) and its width (that is to say its dimension in the direction y) is by example of the order of 4 pm. The depth and width of trench 5 could obviously have other values. For example, the depth may be greater than or equal to half the thickness of the plate (or of the component) and less than or equal to 90% of the thickness of the plate (or of the component), preferably less than or equal to 60% of said thickness. The width may be greater than or equal to 1 μm and less than or equal to 10 μm, preferably less than 5 μm.
The etching of the timepiece component 1 ("DRIE_1") and the etching of the opening 5 ("DRIE_3") of the pre-spotting area 4 can be carried out simultaneously by deep reactive ion etching (DRIE).
The opening 5 allows to create in the clip 3, at the connecting end of the clip 3 to the component 1, an area of lower mechanical strength (that is to say the pre area -spotting 4) and initiate rupture at the desired location on component 1.
Step S4 consists in releasing the timepiece component 1 from the plate 2, by breaking or breaking the fasteners 3 along their break line. The rupture can be caused by exerting on the fastener 3 a mechanical force in a direction perpendicular, or substantially perpendicular, to the plane of the plate (corresponding to the direction z in FIGS. 1A and 1B). By “substantially perpendicular” is meant a direction having an angle of plus or minus 10 ° relative to the direction perpendicular to the plate (or perpendicular to the plane of the plate). As a variant, the rupture is caused by exerting on the fastener 3 a mechanical force in a direction having an angle less than or equal to 45 ° relative to a direction perpendicular to the plate, in particular less than or equal to 30 ° relative to a direction perpendicular to the plate. The material of the plate 1 being a fragile material, having no domain of plastic deformation, the force applied perpendicularly, or substantially perpendicularly, or else in a direction close to the perpendicular to the plate, has the effect of breaking the material. at the level of the pre-spotting zone 4, along the breaking line. Breakage is facilitated and controlled thanks to the pre-spotting area 4. One could also consider releasing component 1 from the plate 2 by completing the etching of the fastener at the pre-spotting area 4 by a treatment. laser, especially with femtosecond pulse laser equipment.
The rupture by mechanical stress in a direction perpendicular to the plane of the plate, in other words by a traction or a twist in the z direction, is simple to implement and favorable for producing components, in particular hairsprings or wheels . Conversely, breaking by mechanical stress in a plane of the plate, in other words by a twist in a direction contained in the x-y plane, for example by stressing a joint, would not be practical to implement. Indeed, this would require providing space around the component to allow movement of the elements, this space therefore cannot be used for the production of other components.
The released watch component 1 has, on its edge, a rupture surface 100, as shown by way of illustrative example in FIG. 7B. This surface 100 has two separate adjacent parts, one engraved 102 and the other broken 101. Part 102 corresponds to one of the U-shaped side walls of the engraved opening 5, while part 101 corresponds to the bottom of the broken U. In fig. 7A, for comparison purposes, a rupture surface has been shown
CH 709 082 B1
100 'obtained with a fastener according to the prior art, without pre-spotting area 4. It can be seen that the breaking surface 100 of FIG. 7B is sharper, cleaner and less extensive than the breaking surface 100 '.
We can consider different embodiments of the pre-spotting area 4. In Figs. 3, 4 and 5, three separate embodiments are shown diagrammatically. For the sake of clarity, similar or corresponding elements shown in the different figures have the same references.
In FIG. 3, the pre-spotting zone 4 comprises an opening 5 in the form of a trench which extends at the connection end of the clip 3 to the component 1, over the entire width of the clip 3, the along a straight breaking line. This is an embodiment similar to that of Figs. 1A and 1B.
In Figs. 4 and 5, the pre-spotting area 4 comprises a plurality of etched openings 5 aligned along the breaking line (this not being shown for clarity, but being similar to that of FIG. 3) and separated by unengraved bridges. The bridges and the openings 5 are here of the same length. They could obviously be of different lengths. The openings 5 are of parallelepiped shape. They can be blind, that is to say engraved in part of the thickness of the plate, or through, that is to say engraved in the entire thickness of the plate. The embodiments of figs. 4 and 5 differ in the dimensions of the openings 5. In FIG. 4, the openings 5 have a width (in the direction y) of 2 μm and a length (in the direction x) of 10 μm. In fig. 5, the openings 5 have a width (in the direction y) of 2 μm and a length (in the direction x) of 2 μm. Of course, the dimensions and shapes of the openings 5 could be different. The dimensions of the openings 5 aligned along the rupture line can for example be as follows:
- length (along the breaking line) between 2 pm and 10 pm;
- width between 1 pm and 5 pm;
- depth greater than or equal to half the thickness of the plate.
In FIG. 8, there is shown, by way of illustrative example, a rupture zone 100 obtained with a pre-spotting zone 4 comprising a plurality of openings 5 aligned along a rupture line and having the following characteristics:
- width of the fastener 3 at the end of the connection to component 1 of 100 μm,
- width of the pre-spotting openings 5 of 4 μm;
- length of the pre-spotting openings 5 of 2 μm;
- 2 pm inter-opening space;
- depth of the openings 5 equal to approximately 80% of the total thickness of the plate.
In this case, the rupture zone 100 comprises a ruptured part 101 (that is to say a rupture surface obtained by rupture of the material) and a part 102 comprising an alternating succession of engraved grooves and broken grooves , arranged vertically. The two parts 101 and 102 are arranged one below the other according to the thickness of the component 1. Note that in fig. 8, the border between the broken part 101 and the grooved part 102 is curved because the etching speed is not equal over the entire length of the breaking line, the areas located near the ends of this breaking line being attacked faster than in the center.
In the above description, the timepiece component 1 and the opening (s) 5 are engraved at the same time. As a variant, the etching of the opening (s) 5 and that of the timepiece component 1 can be carried out separately. In this case, the opening (s) can be made by various ablation techniques, for example by DRIE etching, by ablation using femtosecond pulses emitted by laser equipment, by mechanical ablation (diamond saw), or other . Preferably, the timepiece component 1 and the opening (s) 5 are engraved at the same time.
To separately engrave the timepiece component 1 and the opening (or openings) 5 of the pre-spotting area, two masking steps can be provided. In this case, a first masking step is carried out to engrave the opening (s) 5 of the pre-spotting area 4. A second masking step is then carried out to engrave the timepiece component 1 and its fasteners 3, while protecting the or the openings 5. One could also envisage the reverse, that is to say making a first masking to engrave the through openings making it possible to form the timepiece component 1 and its fasteners 3, then a second masking to engrave the pre-spotting openings 5 while protecting the through openings. Masking may consist of mechanical masking or masking carried out by photolithography of a photosensitive resin.
In the case of simultaneous etching of the timepiece component 1 and of the pre-spotting opening (s) 5, the depth of the opening (s) 5 depends on various parameters relating to the etching of the timepiece component, in particular the attack speed of the DRIE etching device and the duration of the attack. In addition, the depth of the opening (s) 5 also depends on the width and the length of this opening (s) 5. In any event, in this case, the duration of attack by the device etching is the same for producing both the openings intended to form the component and the opening (s) for pre-spotting 5, simultaneously. It is therefore preferable that the width of the pre-spotting openings 5 is less than the width of the through openings forming the watch component, or, in the case where the through openings forming the watch component have different widths from one another, less at the smallest of the widths of the through openings forming the timepiece component. In particular, if the width of the through openings forming the component is greater than 40 μm, and / or is contained within a range
CH 709 082 B1 with values between 40 pm and 100 pm, or is greater than 100 pm, the width of the pre-spotting openings 5 will advantageously be between 1 and 10 pm, or even between 1 and 5 pm. Thus, in the case where the through openings intended to form the timepiece component and the pre-spotting opening (s) are produced simultaneously, the width chosen for the pre-spotting opening (s) 5 according to the The invention ultimately depends on the smallest of the widths of the through openings forming the timepiece component and on the desired depth for the pre-spotting opening (s). In addition, the width of the pre-spotting opening (s) may depend on particularities of the process and / or the DRIE etching equipment used. A person skilled in the art will be able to carry out the adjustment tests necessary to determine the optimal width of the pre-spotting openings 5.
The method may also include additional treatment steps, carried out before or after release of the component, such as a prior thinning of the plate of micro-machinable material (to reduce its thickness), coating deposition, treatment thermal oxidation, cleaning / degreasing, etc.
We will now describe different forms or alternative embodiments of the pre-spotting area with reference to FIGS. 10A to 10F. In these figures, the rupture line along which the pre-spotting area extends is marked "L".
In the case of a pre-spotting area having a continuous opening 5, of the type shown in Figs. 1A and 1B, a pre-spotting opening 5 of variable width could be engraved along the breaking line. In this case, this also makes it possible to vary the depth of the opening along the breaking line, denoted L, as shown in FIGS. 10A and 10B, which respectively represent a top view of a fastener 3 between the plate 2 and the component 1 and a zoomed view in section in the plane defined by the axes x and z, of the pre-spotting opening 5 .
For comparison, FIGS. 10C and 10D respectively represent a top view of a fastener 3 between the plate 2 and the component 1 and a zoomed view in section in the plane defined by the axes x and z of the pre-spotting opening 5, in accordance with the first embodiment in which the width and the depth of the pre-spotting opening 5 are constant along the breaking line L.
Figs. 10E and 10F respectively represent a top view of a fastener 3 between the plate 2 and the component 1 and a zoomed view in section in the plane defined by the axes x and z, of the pre-spotting opening 5, conforming in the second embodiment in which the pre-spotting zone comprises a plurality of openings aligned along the breaking line L.
The presence of a rupture line is advantageous because it makes it possible to precisely determine the location and the extent of the rupture surface. This is not the case if a technique known from the prior art is used which consists, for example, in providing a simple bridge of material or a bridge of material of smaller width and / or less thickness. In this case, the location of the rupture is not precisely determined. It may be somewhere along the weakened material bridge, and may be as close to the component as to the rest of the plate. This results in uncertainty about the location of the rupture. In addition, in some cases, the rupture degrades the aesthetic appearance of the component, or even its operating efficiency, which proves to be particularly troublesome.
The invention also relates to a timepiece component having a partially etched rupture zone. By "rupture zone" is meant the portion of the component edge (over the entire thickness of the component) containing one or more rupture surfaces. Depending on the embodiment of the component manufacturing process, the rupture zone can include:
- a fully engraved part and a fully broken part arranged one above the other (depending on the thickness of the component);
- a part comprising an alternating succession of engraved grooves and broken grooves, and a fully broken part, arranged one above the other (depending on the thickness of the component);
- an alternating succession of engraved grooves and broken grooves (over the entire thickness of the component).

权利要求:
Claims (16)
[1]
claims
1. Method for manufacturing a timepiece component (1) comprising the following steps:
- provide (S1) with a plate (2) made of a micro-machinable material;
- Form (S2) the timepiece component (1) with at least one attachment (3) for holding the rest of the plate (2), by etching the plate (2);
characterized by the fact that it comprises a step (S3) consisting in producing, along a line (L) of the desired rupture of the fastener, a pre-spotting zone (4) comprising at least one opening (5 ) obtained by etching in the thickness of the plate (2).
[2]
2. Method according to claim 1, characterized in that the timepiece component (1) is formed by etching the plate (2) throughout its thickness.
[3]
3. Method according to claim 1 or 2, characterized in that said at least one opening (5) is obtained by etching a portion of the thickness of the plate (2).
[4]
4. Method according to one of claims 1 to 3, characterized in that said at least one opening (5) extends along the entire rupture line (L).
CH 709 082 B1
[5]
5. Method according to one of claims 1 to 3, characterized in that the pre-spotting area (4) has a plurality of openings (5) aligned along the rupture line (L).
[6]
6. Method according to one of the preceding claims, characterized in that the depth of the at least one opening (5) or openings (5) is less than or equal to 90% of the thickness of the plate (2), preferably less than or equal to 60% of said thickness, and greater than or equal to half the thickness of the plate (2).
[7]
7. Method according to one of the preceding claims, characterized in that the etching of the timepiece component (1) and the etching of the at least one opening (5) of the pre-spotting area (4) are made so simultaneously.
[8]
8. Method according to the preceding claim, characterized in that the width of said at least one opening (5) of the pre-spotting area (4) is less than the width of a through opening intended to form the timepiece component, in particular less to the smallest of the widths of a plurality of through openings forming the timepiece component.
[9]
9. Method according to one of claims 7 and 8, characterized in that said through opening width intended to form the component being greater than 40 μm, the width of said at least one opening (5) of the pre zone -spotting (4) is between 1 and 10 pm, in particular between 1 and 5 pm.
[10]
10. Method according to one of the preceding claims, characterized in that the etching of the timepiece component (1) and the etching of the at least one opening (5) of the pre-spotting area (4) are produced by etching deep reactive ionic.
[11]
11. Method according to one of the preceding claims, characterized in that the material of the plate (2) is a fragile material, in particular one of the materials of the group comprising silicon, diamond, quartz and ceramic.
[12]
12. Method according to one of the preceding claims, characterized in that it comprises a step (S4) of releasing the timepiece component (1) by breaking the fastener (3) along the breaking line (L) .
[13]
13. Method according to the preceding claim, characterized in that, during the step (S4) of releasing the timepiece component, the rupture is caused by exerting on the fastener (3) a mechanical force in a direction having a lower angle or equal to 45 ° relative to a direction perpendicular to the plate, in particular less than or equal to 30 ° relative to a direction perpendicular to the plate, preferably in a direction perpendicular, or substantially perpendicular, to the plate.
[14]
14. Method according to one of the preceding claims, characterized in that the timepiece component (1) is one of the elements of the group comprising a hairspring, a wheel, a needle, a spring, an anchor and a balance.
[15]
15. Plate in micro-machinable material comprising a timepiece component (1) and at least one clip (3) for holding between the timepiece component (1) and the rest of the plate (2), formed by openings etched in the thickness of the plate (2), characterized in that it comprises a zone (4) for pre-spotting the timepiece component (1) comprising, along a line (L) of the desired break in the fastener ( 3), at least one opening (5) etched in the thickness of the plate (2).
[16]
16. Watch component (1) made of micro-machinable material comprising a partially etched rupture zone (4), obtained from a plate according to claim 15.
CH 709 082 B1
CH 709 082 B1

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EP1932804B1|2017-03-22|Mixed silicon/metal parts and associated manufacturing methods

---

FR2727648A1|1996-06-07|METHOD FOR THE MICROMECHANICAL MANUFACTURE OF NOZZLES FOR LIQUID JETS

---

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---

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---

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---

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同族专利:

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公开号 | 公开日

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JP6595483B2|2019-10-23|

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CN113791531A|2021-12-14|

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WO2015092012A2|2015-06-25|

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US20160320753A1|2016-11-03|

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US20190137934A1|2019-05-09|

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CN105960612A|2016-09-21|

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EP3083487B1|2020-01-08|

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US10209676B2|2019-02-19|

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WO2015092012A3|2015-08-20|

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EP3632839A1|2020-04-08|

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CH709082A2|2015-06-30|

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JP2017502284A|2017-01-19|

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EP3083487A2|2016-10-26|

引用文献:

---

公开号 | 申请日 | 公开日 | 申请人 | 专利标题

---

---

FR2731715B1|1995-03-17|1997-05-16|Suisse Electronique Microtech|MICRO-MECHANICAL PART AND METHOD FOR PRODUCING THE SAME|

---

CN1236123A|1998-05-20|1999-11-24|胡新知|Pointer sheet for clock|

---

EP1270504B1|2001-06-22|2004-05-26|Nanoworld AG|Semiconductor device joint to a wafer|

---

CH699110A1|2008-07-10|2010-01-15|Swatch Group Res & Dev Ltd|Mechanical component i.e. escape wheel, fabricating method for timepiece, involves assembling attachment on component such that component is ready to be mounted without requiring to touch component, and liberating component from substrate|

---

EP2189854A1|2008-11-21|2010-05-26|Nivarox-FAR S.A.|Method for manufacturing a micromechanical part|

---

DE102008061182A1|2008-12-04|2010-06-10|Konrad Damasko|Manufacturing a microcomponent for mechanical clockwork of a wristwatch, comprises providing layer sequence consisting of carrier-, intermediate- and wearing layer, and cutting-off the microcomponent made of wearing layer by laser cutting|

---

WO2013093108A1|2011-12-22|2013-06-27|CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement|Method for freeing a micromechanical part and a micromechanical part comprising sacrificial fasteners|EP3112954A1|2015-06-29|2017-01-04|Universo S.A.|Method for manufacturing clock components for timepieces|

---

FR3039292B1|2015-07-24|2019-05-31|Commissariat A L'energie Atomique Et Aux Energies Alternatives|SPIRAL SPRING AND METHOD OF MAKING THE SPIRAL SPRING|

---

CH711938A1|2015-12-21|2017-06-30|Evosigne Sa|Process for manufacturing parts for watchmaking|

---

US20180088530A1|2016-11-30|2018-03-29|Firehouse Horology Inc.|Geometries for Hairsprings for Mechanical Watches Enabled By Nanofabrication|

---

CN106982509A|2017-04-28|2017-07-25|江门市科隆达半导体照明有限公司|A kind of high availability wiring board and preparation method thereof|

---

EP3412625A1|2017-06-05|2018-12-12|Nivarox-FAR S.A.|Method for manufacturing a micromechanical part|

---

EP3495894A1|2017-12-05|2019-06-12|Rolex Sa|Method for manufacturing a clock component|

法律状态:
2018-12-14| PFA| Name/firm changed|Owner name: ROLEX SA, CH Free format text: FORMER OWNER: ROLEX SA, CH |

优先权:

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申请号 | 申请日 | 专利标题

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EP13198950|2013-12-20|

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